FEATURES / BENEFITS
Measurement accuracy
Best solution for low-noise and 1/f measurements with advanced PureLine, AutoGuard and
MicroChamber
®
technologies
Minimize AC and spectral noise with effective shielding capability
Positioning accuracy
Precision 4-axis semi-automatic stage for accurate positioning with temperature compensation and
automated XYZ and theta correction for enhanced positioning accuracy
Manual 3-axis stage enables fast, accurate “hands on” wafer positioning with ergonomic controls
Productivity
Unattended testing over multiple temperatures with VueTrack™ technology and High-Temperature
Stability (HTS) enhancement
eVue™ digital imaging system with enhanced optical visualization, fast set-up, and in-die and wafer navigation
Powerful automation tools, such as automatic die-size measurements and wafer alignment
CellView enables fast sub-die navigation
Flexibility and
RF/microwave device characterization, 1/f, WLR, FA and design debug
application-tailored
Complete solution for small- and large-area multi-site probe cards
solutions
Seamless integration between Velox and analyzers/measurement software