Electrical Characterization Probe Station

The powerful Velox™ probe station control software features easy on-screen navigation, wafer mapping, automation and seamless integration with analyzers and measurement software. It enables simple operation of motorized positioners and thermal systems. For a wide range of applications, the Summit probe station powered by Velox software achieves high test efficiency.

ENG-N045 probe

FEATURES / BENEFITS

Measurement accuracy

Best solution for low-noise and 1/f measurements with advanced PureLine, AutoGuard and

MicroChamber

®

technologies

Minimize AC and spectral noise with effective shielding capability

Positioning accuracy

Precision 4-axis semi-automatic stage for accurate positioning with temperature compensation and

automated XYZ and theta correction for enhanced positioning accuracy

Manual 3-axis stage enables fast, accurate “hands on” wafer positioning with ergonomic controls

Productivity

Unattended testing over multiple temperatures with VueTrack™ technology and High-Temperature

Stability (HTS) enhancement

eVue™ digital imaging system with enhanced optical visualization, fast set-up, and in-die and wafer navigation

Powerful automation tools, such as automatic die-size measurements and wafer alignment

CellView enables fast sub-die navigation

Flexibility and

RF/microwave device characterization, 1/f, WLR, FA and design debug

application-tailored

Complete solution for small- and large-area multi-site probe cards

solutions

Seamless integration between Velox and analyzers/measurement software

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