The AXIS Ultra DLD incorporates market leading AXIS technology includingco-axial charge neutralisation, magnetic immersion lens and real parallelimaging. Sample manipulation in the sample analysis chamber (SAC) isfully automated. Each component of the spectrometer will be covered in thefollowing sections with details description for operation of the spectrometer in spectroscopic and imaging modes
X-ray source Monochromatic X-ray source (Al Kα)
Conventional X-ray source (Al Kα and Mg Kα)
Measurement area 700um x 300um – 15um in diameter
Neutralizer Low energy electron beam
Ar ion gun Monomer
Additional system Heating/Cooling system
Gas treatment chamber
Transfer vessel
Automatic measurement
Additional method Auger Electron Spectroscopy (AES)
Ultraviolet Photoelectron Spectroscopy (UPS)
Secondary Ion Mass Spectroscopy (SIMS)
Information Elemental composition
Chemical state of atoms
Depth profiling
Mapping
Using the transfer vessel, it is possible to measure the sample without exposing it to the atmosphere.
Long term measurements are carried out automatically during day and night.