Processing of a wide range of products, including semiconductors and metallic thin films for flat panel displays or other devices and optics. Uses 266/532/1064 nm pulsed laser source.
The HOYA laser cutter system stands out for its micro processing capabilities, utilizing extra-high laser output to facilitate large-area processing with remarkable precision. With a versatile range of wavelengths including 1064nm (IR), 532nm (Green), 355nm (UV), and 266nm (DUV), it can handle various materials such as metals (Chromium, Aluminum, Copper, Gold, etc.) and semiconductor materials like Silicon nitride and Polyimide. Its applications span from welding and wiring TFT panels to color filter processing in flat panel displays, and even exfoliation of protection layers for integrated circuits. With a repeat frequency of up to 50Hz, it ensures efficient handling of diverse tasks, making it a preferred choice for industries requiring intricate and accurate material processing.
The system performs 10-20-micron-wide linear cuts via repeated laser pulses focused on a small spot within the objective’s field of view. The Thorlabs xyz stages with 25 mm travel range can be programmed to move in a continuous path during laser exposure. Users can interface with the Thorlabs software to set the coordinates for the type of cuts they want to perform.