Equipment

Single Crystal X-ray Diffractometer: Measure crystalline single crystals non-destructively, revealing precise details like unit cell dimensions, bond lengths, bond angles, and site-ordering arrangements.

High-precision linear motor wire EDM (Electrical Discharge Machine).

高精度リニアモーターワイヤーEDM（電気放電加工機）

The Ulvac CAM-S is a vacuum sputtering deposition system used for thin film of metal, dielectric and other exotic materials.

A new AC frequency variable control with high quality welding of aluminum. Even when the AC frequency is high, the welding current is reduced, and the quality of the welding is uniform. Touch-panel operation panel for easy viewing and use. This is a type that can be used with AC current.

Thin Film X-ray Diffractometer: Measure thin film samples non-destructively, revealing crystal structure and orientation from the surface.

Picosecond spectrophotometry: measures fluorescence dynamics (15 ps resolution), UV-vis excitation, visible/NIR emission, polarization, spatial mapping.

Laser cutting and engraving of polymers and organic materials up to 813 mm x 457 mm 75 watt/ 10.6 micron wavelength

The Jetlight is used to remove organics and particles on substrate using oxygen radicals.

Analyzes physical properties and substance concentration by measuring light absorption and reflectance across UV and visible spectra.

The VARIAXIS j-600 5X vertical machining center is a simultaneous 5-axis vertical machining center.

Vacuum constant temperature dryer (vacuum dry oven)

The Kulicke and Soffa Model 4523 wedge wire bonder provides electrical interconnects between a device chip and package using aluminum or gold wires.

X-ray Photoelectron Spectroscopy (XPS) / Electron Spectroscopy for Chemical Analysis (ESCA) It is possible to obtain information about the elemental composition and the chemical state of the atoms by measuring the energy of photoelectrons emitted from the sample surface by X-ray. The information to be analyzed is obtained from several nm below the surface. This state-of-the-art XPS instrument has a capability to analyze the very small area where the user is interested in and a large area of the uniform sample surface.

The AXIS Ultra DLD incorporates market leading AXIS technology includingco-axial charge neutralisation, magnetic immersion lens and real parallelimaging. Sample manipulation in the sample analysis chamber (SAC) isfully automated. Each component of the spectrometer will be covered in thefollowing sections with details description for operation of the spectrometer in spectroscopic and imaging modes X-ray source Monochromatic X-ray source (Al Kα) Conventional X-ray source (Al Kα and Mg Kα) Measurement area 700um x 300um – 15um in diameter Neutralizer Low energy electron beam Ar ion gun Monomer Additional system Heating/Cooling system Gas treatment chamber Transfer vessel Automatic measurement Additional method Auger Electron Spectroscopy (AES) Ultraviolet Photoelectron Spectroscopy (UPS) Secondary Ion Mass Spectroscopy (SIMS) Information Elemental composition Chemical state of atoms Depth profiling Mapping Using the transfer vessel, it is possible to measure the sample without exposing it to the atmosphere. Long term measurements are carried out automatically during day and night.