Oxygen Plasma Cleaner

The Plasma Prep is a low-pressure oxygen plasma system used for cleaning or activation of surfaces.

ENG-N35 oxygen plasma cleaner Plasma PrepⅢ

Small plasma cleaner are compact devices used to remove contaminants and organic residues from surfaces using a low-pressure oxygen plasma generated within a vacuum chamber, effectively cleaning and activating surfaces for subsequent processes such as bonding, coating, or analysis.

Share on:

Features

RF Power: 1 to 100W @13.56MHz (manual matching) Typical pressure: 100mTorr Sample size: from small piece to 3-inch wafer