Electron Beam Evaporator 2

The Kawasaki Science evaporator is a vacuum evaporation system used for thin films deposition of metal, alloys and exotic materials. It’s a physical vapor deposition system that combines Joule effect and electron beam Evaporation techniques.

e beam evaporator 2 kawasaki.jpg

This principle is the same for all thermal evaporation technologies, only the method used to heat the source material differs. There are two popular evaporation technologies, which are resistive evaporation and electron beam evaporation. Thermal evaporation depositions are vacuum-based processes where a focused electron beam or high current melts or evaporates a target material. Once vaporized, it reaches without collision (high vacuum) the substrate and then condenses onto it to form a thin film with controlled properties, the substrate being upside down. The thickness is monitored in live using crystal quartz balance.

Share on:

Features

Electron gun 2kW Output voltage: 3.5 to 4.6kV Output current: 0 to 500mA Resistance heater power 1kW, up to 80A Rate monitoring using single Quartz crystal balance Substrate size up to 2-inch Stage rotation 360° manual

Tilting angle: 0 to 60° In-situ configuration: - 3 crucibles of 1cc (e-beam) - 1 boat (resistance heater) Available materials: - Au (Gold) - Ag (Silver) - Cu (Copper) - Ti (Titanium) - Pd (Palladium) - Pt (Platinum) - Al (Aluminum) - Nb (Niobium) - Co (Cobalt) - V (Vanadium) - Ni/Cr (Nichrome) - Ni (Nickel) - Cr (Chromium) - Bi (Bismuth) For additional material, contact nanofab team.