Atomic Force Microscope (AFM) (SPM)
The Icon is the latest evolution of our industryleading, tip-scanning AFM technology, incorporating temperature-compensating position sensors to render noise levels in the sub-angstrom range for the Z-axis, and angstroms in X-Y. This is extraordinary performance in a large-sample, 90-micron scan range system, surpassing the open-loop noise levels of highresolution AFMs. The new design of the XYZ closed-loop head also delivers higher scan speed, without loss of image quality, to enable greater throughput for data collection.
Features
X-Y scan range 90µm x 90µm typical, 85µm minimum
Z range 10µm typical in imaging and force curve modes, 9.5µm minimum
Vertical noise floor <30pm RMS in appropriate environment typical imaging bandwidth (up to 625Hz)
X-Y position noise (closed-loop) ≤0.15nm RMS typical imaging bandwidth (up to 625Hz)
X-Y position noise (closed-loop) ≤0.10nm RMS typical imaging bandwidth (up to 625Hz)
Z sensor noise level (closed-loop) 35pm RMS typical imaging bandwidth (up to 625Hz); 50pm RMS,
Force curve bandwidth (0.1Hz to 5kHz) Integral nonlinearity (X-Y-Z) <0.5% typical
Sample size/holder 210mm vacuum chuck for samples, ≤210mm diameter, ≤15mm thick
Motorized position stage (X-Y axis) 180mm × 150mm inspectable area; 2µm repeatability, unidirectional; 3µm repeatability, bidirectional Microscope optics 5-megapixel digital camera; 180µm to 1465µm viewing area; Digital zoom and motorized focus
Controller NanoScope V Workstation Integrates all controllers and provides ergonomic design with immediate physical and visual access Vibration isolation Integrated, pneumatic Acoustic isolation Operational in environments with up to 85dBC continuous acoustic noise AFM modes Standard: ScanAsyst, TappingMode (air), Contact Mode, Lateral Force Microscopy, PhaseImaging, Lift Mode, MFM, Force Spectroscopy, PeakForce Tuna, Force Volume, EFM, Surface Potential, Piezoresponse Microscopy, Force Spectroscopy; Optional: PeakForce QNM, HarmoniX, Nanoindentation, Nanomanipulation, Nanolithograpy, Force Modulation (air/fluid), TappingMode (fluid), Torsional Resonance Mode, Dark Lift, STM, SCM, C-AFM, SSRM, TUNA, TR-TUNA, VITA
